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Influence of fluoride content on the anodic formation of TiO2nanopores/nanotubes in Ti films

P.M.Perillo, D.F.Rodr�?�?�?�?�?�?�?­guez

The formation of nanostructured TiO2 oxides in the formof nanotubes or nanopores grown on Ti films was investigated. Ti thin films were deposited by radio-frequency (RF)magnetron sputtering on silicon substrates and then anodized. Anodization was performed in glycerol electrolytes containing 0.6 wt.% and 1.2 wt.% ammonium fluoride (NH4F) with an applied potential from 20 to 60 V. The morphology and structure were identified by means of scanning electron microscopy (SEM) and X-ray diffractometry (XRD). The effect of fluoride concentration on the forma-tion of nanotubes or nanopores prepared on Ti thin layer have not been understood, besidesmost of the works are focused on Ti sheet. We show in the present work that a simple parameter as the NH4F content in the electrolyte can turn themorphology fromporous to tubular. It can allow an understanding of themechanism of formation of pores/tubes and its practical impact.